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| The Filmetrics F20 is a fast,
non-contact optical probe for measuring the thinckness of transparent and semi-transparent
thin films. The instrument uses a fibre optic probe to measure the spectral
reflectance from the sample. The reflected signal from the surface and any
interfaces will interfere. This signal will vary depending on the thickness of any surface
films. The system software generates a model of the reflectance based on optical
properties and compares the model with the measured data. The technique measures the
light that is reflected from a material over a broad spectrum. If the optical
properties of refractive index (n) and absorption coefficient (k) are known, the
reflectance data can be fitted to models that will estimate thickness parameters. |
| Film thicknesses from
0.02 up to 50 µm can be measured - i.e. from semiconductor films up to free-standing
polymer structures. Multiple layers can also be studied. |
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